monocrystal sappire wafers
WaferHome can manufacture the high purity Semi Grade(等级)/optics Grade(等级) Sappire wafer wafers
Specification for monocrystal sappire wafers
Grade(等级) | Dimeter(直径) | Roughness |
Orientaion |
thickness(厚度) | Flat |
Surface | Geometric parameter |
---|---|---|---|---|---|---|---|
Epi-ready sappire wafer | 50.8mm | <0.3nm | <0001> <1102> or special orientation |
450um+/-20 | to <1120> <1100>16mm | polished/etched polished/polished | TTV < 5um TIR <5um BOW < 10um Warp < 10um |
76.5mm | <0.3nm | <0001> <1102> or special orientation | 450um+/-20 | to <1120> <1100>22.5mm | polished/etched polished/polished | TTV < 5um TIR <5um BOW < 10um Warp < 10um | |
100mm | <0.3nm | <0001> <1102> or special orientation | 650um+/-20 | to <1120> <1100> 32.5mm | polished/etched polished/polished | TTV < 15um TIR <10um BOW < 20um Warp < 20um | |
150mm | <0.3nm | <0001> <1102> or special orientation | 1500um+/-20um | to <1120> <1100> 47.5mm | polished/etched polished/polished | TTV < 15um TIR <10um BOW < 20um Warp < 20um | |
Pattern sappire wafer | 50.8mm | <0.3nm | <0001> <1102> or special orientation |
450um+/-20 | to <1120> <1100>16mm | Pattern Feature customization Epi-ready polished | TTV < 5um TIR <5um BOW < 10um Warp < 10um |
76.5mm | <0.3nm | <0001> <1102> or special orientation | 450um+/-20 | to <1120> <1100>22.5mm | Pattern Feature customization Epi-ready polished | TTV < 5um TIR <5um BOW < 10um Warp < 10um | |
100mm | <0.3nm | <0001> <1102> or special orientation | 650um+/-20 | to <1120> <1100> 32.5mm | Pattern Feature customization Epi-ready polished | TTV < 15um TIR <10um BOW < 20um Warp < 20um | |
150mm | <0.3nm | <0001> <1102> or special orientation | 1500um+/-20um | to <1120> <1100> 47.5mm | Pattern Feature customization Epi-ready polished | TTV < 15um TIR <10um BOW < 20um Warp < 20um | |